MCRF Site Visit

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Nov 15, 2013 (3 years and 7 months ago)

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McGill
Nanotools

Microfab

Facility:
MCRF Site Visit


Peter
Grutter

Academic Director


September 2011

McGill Nanotools Microfab Facility


3300sq.ft
. facility, 1000
sq.ft
. clean room
space.


$13
million
capital investment
,
$615K/year
operating budget



In
2010
:


87
individual
projects


42 principal investigators


38% users external to McGill


Internal
users from
5
faculties


10
corporate
users


91
students/PDFs
trained


At least 63 peer reviewed papers, 6 patents,
52 thesis




0.7um
features

Outline
-

Selection Criteria


Accreditation:

1.
Character of the facility

2.
Efficient use of the facility

3.
Quality of the nanotechnology research program



Accessibility:

4.
Users

5.
Benefits for Quebec

6.
Integration and promotion

7.
Development plan

3

1. Characteristics of the Facility


Facility:
over the past 10 years over 13M$ capital equipment
invested by Quebec, CFI and NSERC



Equipment enables
R&D

and
training

in:

1.
Nanoelectronics


2.
Nanobiology


3.
NEMS/MEMS


4.
Nanophotonics




Providing leadership
within QNI:


integrating
fabs

of 4 major universities in Quebec:


Training:
NSERC CREATE ISS (2009)


Infrastructure support
: NSERC MRS (2011, in prep.)


4

1. Characteristics of the Facility

Equipment:



Complete NEMS/MEMS
fab

facility (see section F for details).


Complementarity

with the global QNI offer (see Section C of
application).

Unique character of McGill
Nanotools

Microfab
:


Ecosphere of integrated training and world
-
class R&D in
terms of processing know
-
how and established
collaborations along 2 major axes:


fundamental


industrial


interdisciplinary (medicine


biology


chemistry



physics


ECE


materials science


tissue eng.)


5

Unique Ecosphere: Green Technology

6

Growing, understanding, processing and integrating
InN

for energy and
sensing applications


University:

Z. Mi (ECE), G. Gervais (Physics), P. Kambhampati (Chemistry), T. Szkopek (ECE), A. Kirk
(ECE), Lennox (Chemistry), R. Sladek (Genomics)


Companies:

ICP Solar Technologies, Future Lightning Solutions,
Silonex

Inc.

DNA Landmarks (St. Jean
-
sur
-
Richelieu, QC), BASF


Government and Crown Corporations:

IREQ (Hydro Quebec), DRDC (Val Cartier, QC), Canadian Space Agency (Brossard, QC)

Unique Ecosphere: Green Technology

MBE growth of
GaN

nanowires

(Z. Mi)

Closed loop growth
-
fabrication
-
characterization
-
application


偲o硩浩瑹xt漠
f慢

捲畣楡氡

7

World’s

most

efficient

phosphor
-
free

white

light

LEDs
:


Devices

grown

in

McGill

MBE

lab

and

fabricated

in

McGill

Nanotools

Microfab
.


17
.
8
.
2011
:

$

667
,
500

MDEIE

for

commercialization

(wafer

scale

demonstration)!

McGill leads the pack in
nanoscale

nitride
semiconductors
. Only nitride MBE system in Canada.

Vol. 11, 1919
(2011).

Zetian

Mi,

ECE,
McGill

Integrated tube lasers
waveguides on Si

OSA Optics Express
19
, 12164 (2011)

Fabrication of Optical Ring Resonators


8

Unique Ecosphere:
SiC

9

SiC

Micromachining compatible with CMOS technologies


University:

Mourad el
-
Gamal

(ECE, McGill), Srikar Vengallatore (Mechanical, McGill)



Companies:

MEMS
-
Vision (Montreal), Thales Inc., Boston Microsystems


The Vision



Very small, for portable devices …


Batch fabrication, for very low cost


Endless functionalities


Much less battery consumption


10

+

Micro

Mechanical

Sensors &

Actuators

=

MEMS

(Micro Electro
-
Mechanical Systems)

State
-
of
-
the
-
Art in MEMS Integration

11

MEMS Technology

Connections

IC Technology

MEMS

Connections

IC

At least three
manufacturing or
assembly facilities are
needed

Objective: “Growing” the mechanical devices

“on top of” the electronics using IC compatible technologies


12

Challenges:
Incompatible temperatures
,

materials
, and chemicals.

-

High elastic modulus

-

High acoustic velocity

-

High fracture strength

-

Sustains higher temp.

-

Inert surfaces

-

Resists corrosion,


erosion, and radiation

-

Biocompatible

A Breakthrough Material ?

13

Before New Inventions
:


-

Difficult to deposit


-

High temp. processing


-

Not compatible with IC


manufacturing


-

High residual stresses


-

Difficult & slow
etching


and
deposition

SiC

is routinely used in the manufacturing of CMOS electronics, for
example in some of today

s state
-
of
-
the
-
art and very high
-
end
microprocessors.

Metals

IC & MEMS

Problems Solved
-

MoSiC
™ MEMS (El
-
Gamal
, McGill)

patented, published, commercialization venture started


MEMS Vision Inc.

Harp
-
like Vibration Sensors

Micro Beam Resonators

Pressure Sensors

Input

Isolation

Micro Switches

Input

Output

Actuation

Isolation

Output

Input

Square Resonators

Tunable Capacitors

Input

Output

14


150

m

12

m

220

m

Stress Control

< 50
MPa

of stress

-

Small gaps


(high sensitivity)

-

High initial


sensors accuracies

High Yield

Problems Solved
-

MoSiC


MEMS

Processing and materials know
-
how key! Many have tried, all others have failed!

15

Unique Ecosphere:
Nanobiotech

& Health

Nanofluidics

Microfluidic

systems

16

3D
microfluidic

probe:

Shear free gradient at the
stagnation point for cell
chemotaxis

studies.


Juncker et al.,

Nature
Commun
.

2

465 (2011)

nanochannel

100 nm

Reisner et al.,
PNAS (2010)

Sculpting the energy
landscape of
polymers and DNA.


DNA melting assay.


Si pins for multi
-
spotting
proteins.

System used to identify 6
relevant markers for
breast cancer. Developing
protein chip.


Pla
-
Roca et al. Mol. Cell.
Prot. (under review)


Myoblast

r
esponse

to RGD
Peptide Gradient (MNI)

reservoirs

nanopore

nanochannel

nanopore

in 20nm thick
SiN
x

membrane

(made via TEM milling)

reservoirs

nanopore

nanochannel

nanopore

in 20nm thick
SiN
x

membrane

(made via TEM milling)

reservoirs

nanopore

nanochannel

nanopore

in 20nm thick
SiN
x

membrane

(made via TEM milling)

reservoirs

nanopore

nanochannel

nanopore

in 20nm thick
SiN
x

membrane

(made via TEM milling)

nanopore

in 20nm thick
SiN
x

membrane (made
via TEM milling)

Conventional
Nanopore

Nanopore

Nanochannel

Concept:
Nanopore
-
Nanochannel

Device

reservoirs

nanopore

nanochannel

Reisner (Physics, McGill)

17

Nanopore
-
Nanochannel
: Device Fabrication

l
oading

microchannel

Membrane

(50x50μm)

nanochannel

1
0μm

nanopore

TEM image of
n
anopore

e
mbedded in
nanochannel

100nm

18

Other concrete example of interdisciplinary interactions

Plasmonic

Micro
-
array Biosensor

Low cost 24,000 element
plasmonic

sensing array based
on patterned, functionalized self assembled gold
nano

rods. Read
-
out: absorption spectrum shift. Integrated
system demonstrated. Currently being tested with
leishmania

(protozoan infection common in northern
Asia), in collaboration with
B. Ward (Fac. of Medicine
)

Kirk (ECE), Lennox (Chem.) and
Reven

(Chem.)

19

Gold
nanorods

100 nm

Read
-
out

cartridge

Completed chip

Cantilever based biochemical sensing

Functionalized
microfabricated

cantilevers
transduct

electrochemical signal
(Lennox (Chem.), Sladek
(Genomics) & Grutter (Physics)).

Systems integration in collaboration with
A. Boisen
(DTU) and M. Roukes (Cal Tech).

Transfer of fundamental insights to
nanowire

sensors: Si
nanowires

(
M. Reed, Yale
) and
InN

nanowires

(
Z. Mi (ECE) and DNA Landmarks Inc.).


Unique Ecosphere Micro/
NanoSystems

20

Grutter (Physics, McGill), Guo
(Physics, McGill), Silva
(Chemistry
UdM
),
Beerens

(ECE,
Sherbrooke
)

Microelectronic Engineering
87
, 652 (2010)

Advanced Materials
21
, 2029 (2009) (including cover page)

J. Phys.:
Condens
. Matter
21,

423101 (2009) (invited topical review)

Phys. Rev.
Lett
.
100
, 186104 (2008)



Light off



Light on



CuPc:PTCDI

deposited on KBr

PTCDA on KBr(001)

Unique Ecosphere Micro/
NanoSystems


Molecular electronics, OPV, CNT, graphene,
nanowires

for topological
quantum computing, ...

21

graphene FET memory cells

T. Szkopek (ECE, McGill), R.
Martel (Chem.,
UdM
)

M.
Siaj
, (Chem. UQAM)

A. Champagne (Concordia)

SNS

Z. Mi (ECE), T. Szkopek (ECE,
McGill), G. Gervais (Physics,
McGill)

Suspended bridge CNT device


3. Quality of Nanotechnology Research Programs

22




From
NanoQuebec’s

website:

http://www.nanoquebec.ca/en/nano
-
in
-
quebec.php


Unique Ecosphere

Training:



New type of students:


Sébastien

Ricoult: neuroengineering PhD with
extensive
fab

experience. Industry needs such
people!


Michael
Ménard
: ECE McGill
-
> Cornell
-
> UQAM


Frédéric

Nabki
: ECE McGill
-
> UQAM
(
NanoQAM
)



NSERC CREATE
s: ($900k p.a. total)


Integrated Sensor systems (2009); PI Kirk


Neuroengineering

(2010); PI Lennox


Nanobiomachines

(2010); PI
Gehring




Nanobiotechnology

Microfab

Course
:

Hands
-
on course, organized by D.
Juncker

4
th

year in 2011, attracted 26 participants
(national, international and industry).



23


2. Efficient operation


Our guiding principle is to
fund operating costs

(including maintenance/repairs)
from user fees
.


Keeping the
Microfab

‘ready for use’ requires
dedicated and highly trained personnel


which is financed by a combination of other
contributions
.


Responsive, transparent management
structure.


User driven


24


4. Usage

25

2806

1097

265

29

135

35

Facility Hours Used
-

FY2008/2009

Engineering(10)

Medicine(3)

Science(9)

Agricultural and Environmental Sciences(1)

External Academic(11)

Industrial(2)

Total PIs (36)

Total Hours =
4367

Source: annual McGill
Nanotools Microfab reports

4210

370

314

1

415

1019

Hours Used
-

FY2010
-
2011

Total PI: 42

Total Hours: 6328

Engineering(13)
Medicine(5)
Science(7)
Agricultural Sc.(1)
External Academics(13)
Industrials(3)

4. Usage

26

2806

1097

265

29

135

35

Facility Hours Used
-

FY2008/2009

Engineering(10)

Medicine(3)

Science(9)

Agricultural and Environmental Sciences(1)

External Academic(11)

Industrial(2)

Total PIs (36)

Total Hours =
4367

4210

370

314

1

415

1019

Hours Used
-

FY2010
-
2011

Total PI: 42

Total Hours: 6328

Engineering(13)
Medicine(5)
Science(7)
Agricultural Sc.(1)
External Academics(13)
Industrials(3)
Expect 75% increase in total hours
per year:


Expect to be able to offer
better and more services to
outside users (both academic
and non
-
academic).


Need to run longer hours.


Expect to increase access by
bio and med. researchers.


40% of PIs hired since 2005



45%
increase in processing tool
capital investment
:

3M$ new
equipment in 2009/10
(
ebeam
,
DRIE, spray coater, PECVD,
evaporator, sputtering)


NanoQuebec funding

1. Increase capacity of McGill
Nanotools

Microfab


Requests by users for extended hours. This is a result of 50 new faculty
since inception and hands
-
on component of NSERC CREATE programs.


Customer services for the life sciences: large number of untapped
biomed users (2 CREATE, 1 CIHR Systems Biology Training grant).


2. Develop active industrial outreach



From academia to industry’. Coordinate disperse academic know
-
how
that solves real
-
world problems for industry and facilitate the creation of
start
-
ups. Complimentary to NQ outreach coordinator.


3. Enable sustainable funding model



27


5. Benefits to Quebec


Empirical observation
:
most companies access
microfabs

through collaboration with academic research groups. They value
the expertise and access to world class facilities of academic
researchers; very few companies have the need or interest to
directly access the
fab
.



In 2010, direct, funded collaborations with more than 10
companies from Quebec in key economic sectors (see p.29 of 34
for list).



In 2010 NEW contracts/grants worth 2.7M$ p.a. were obtained
(2009: 1.3M$). These grants are often multi
-
year and fund HQP,
R&D as well as
fab

access.


28


6. Integration and Promotion within the
QNI

Integration & Leadership:


Founding member of NQ
(2000)


NSERC CREATE ISS
(2009)


NSERC MRS QNI
(to be submitted 2011)


Increased international visibility:


In 2010 McGill
nano

researchers have signed
MOUs

and
started exchanging researchers with:


RIKEN

(Japan): green chemistry,
nanoelectronics


IIT Mumbai
(India): micro and nanofabrication training


IoP

CAS
(Beijing):
nanoelectronics

and photonic


29

Google ‘
microfab
’: ranks nr. 2 !!!


7. Development plan for the facility


Development and upgrade plans for the McGill
Nanotools

Microfab

are driven by its users and coordinated with other
facilities.



In upcoming CFI call VII the McGill
Nanotools

Microfab

facility will
replace, upgrade and expand equipment necessary for:


Fabrication, including material deposition and growth


Packaging and assembly


Characterization


In particular we are planning to establish
a rapid prototyping facility
suitable for bio/medical applications



30


Summary


Unique R&D and training ecosystem: from fundamental to
applied, across all disciplines.


Broad user base and efficient management


NanoQuebec

and partners finance ‘ready for business’ status; users pay
for operation.


Close interactions of Science & Eng. with biomed R&D
unique among all
NanoQuebec

supported
fabs
. By increasing
fab

manpower we will capitalize on this opportunity.


New outreach and industrial coordinator to facilitate
knowledge transfer and the creation of start
-
ups.


NanoQuebec

funding to partially replace unsustainable
current bridge funding from MIAM.

31

What will 300k$ from NanoQuebec
enable?


Extended operation hours needed due to usage
increase.



Incorporation of unique R&D ecosphere within NQ


from fundamental to applications.



Grow and nurture emerging applications in bio med.



In
-
reach coordinator to take advantage of academic
know
-
how and facilitate transfer to industry.


32














Budget details: Expenses

33

(see p 14 of 34 for overview)


Budget details: Expenses

34


Future:














Budget details: Revenues

35

(*) CREATE: cash from McGill support of ISS,
Neuroeng
. and
Nanobiomachines

for help with facilitating internships as a result of
Business Development person.

(see p. 14 of 34 for overview)


Budget details: Revenues

36

Current (past):
(partial) FTE to bridge funding
shortfall and establish well functioning infrastructure.


Future:
Equivalent in cash, frees up the previously
used manpower to support intensified R&D and
training at CMP.


Note:
Increased MIAM funds will directly benefit
fab



training, networking, characterization facility support
(e.g. SEM, TEM).



Complementarity

with other
microfabs

37



Toolset (in particular spray coater, wafer bonder)




Processing know
-
how (
SiC
, nitrides,
microfluidic

systems)



Leadership



Training


Statistiques

d'utilisation

des QNI

38

Source: RQMP annual report (2011)