3

1
DEPARTMENT OF MECHANICAL ENGINEERING
UNDERGRADUATE COURSES:
Mechanical
Vibration/3 credits
Prereq: Applied
Mechanics (
2)
1. Free vibration of SDOF systems 2. Forced vibration of SDOF systems
3.
Multi

degrevibrations of freedom systems 4. Vibration of con
tinuous systems
5.
Introduction to modal analysis (Prof. Chen, Lien Wen)
Advanced Materials Mechanics/3 credits
Prereq: Materials
Mechanics (
2)
1. Stress and strain 2. Torsion problems 3. Basic analysis of plates & shell
4.
Inelastic deformation 5. Fatigu
e and fracture (Prof
. Chen
, Lien Wen)
Basic Computer Concept
1. Introduction to computer concepts 2. Computer peripheral
devices 3.
Number
systems 4. Data representation 5. Programming language and
program design
6.
MS Dos system and chinese systems 7. In
troduction to
software packages
8. File
and data processing 9. Data communication and
networks 10.
The application and
development of computer future 11. Fortran
programming language
12. Word
processing package: PE3 and Comet
(Prof
. Huang
, Chintien; Wang,
J. J.; Hsu, Lai
Hsing)
Computer
Graphics/3 credits
Prereq: Basic Computer Concept
1. Introduction to computer graphics 2. Two

dimensional transformations
3.
Three

dimensional transformations 4. Plane curves 5. Space curves
6. Surface
description and gener
ation (Prof
: Hsu
, Lai Hsing)
Automatic
Control/3 credits
Prereq: Engineering
Mathematics (
2)
1. Introduction to control systems 2. Mathematical models of
systems 3.
3

2
Feedback control systems 4. Performance of feedback control
systems 5.
Stability
of linear
feedback control systems 6. The root

locus
method 7.
Frequency response
method 8. Stability in the frequency
domain 9.
PID control and compensator 10.
Digital control systems
11. Several control experiments will be provided for
hands

on experience
(Prof
.
Ju
, Ming Shaung; Shih, Ming Chang; Tsay, Tsing Iuan)
Hydraulic
and Pneumatic Engineering/3 credits
Prereq: Fluid Mechanics
(1) Hydraulic Engineering
: 1.
Introduction 2. Basic principles of fluid power
3.
Hydraulic pump, motors and cylinders 4. Hydraulic
control valves (Direction,
pressure and flow control) 5.
Hydrostatic
transmission 6. Hydraulic
accessories 7. Basic hydraulic control circuits 8. Application of hydraulic
control circuits
(2) Pneumatic Engineering
: 1.
Introduction 2. Compressed air supply
units 3.
Pneumatic
control valves
4. Basic pneumatic control circuits 5.
Design of
pneumatic circuits
6. Application of pneumatic control circuits (Prof
. Shih
,
Ming Chang)
Heat Power Testing (junior)
1. The bomb calorimeter 2. Heating value of gaseous fue
ls
3. Proximate analysis
of coal 4. Liquid fuel analysis 5. Gas turbine test
6. Solar cell tests 7. Rotary engine
tests
Materials Testing
1. Tension with stress

strain measurement 2. Mechanical properties in tension
3.
Impact testing, hardness testing, co
mpression testing, fatigue testing
4. Observation
of microscopic structure of steel
Servo Systems/3 credits
Prereq: Automatic Control
This is a continuation of the course in Automatic Control. It
presents the basic
concepts of analysis and design in a se
rvo
mechanism
system where system
components and different control
configurations are studied in some detail. The
3

3
main contents of the
course are the basic concepts of a servo system, components'
characteristics, practical analysis skills, design methods
and
performance analysis.
(Prof
. Tsai
, Ming Chi)
Industrial
Electronics/3 credits
Prereq: Electronics
This course is intended to introduce practical industrial control
systems. The
devices and
systems that are presented
have been chosen
to represent a br
oad range
of industrial applications. The overall
aim is to show how individual devices and
circuits interrelate to form
useful systems.
(Prof
. Wang
, J. J.)
Power Plant Design
Practice in boiler design and drawing. The study of fuel and ash
handling
equ
ipment
; pulverizer, condenser, heater, deaerator,
evaporator, water technology,
boiler control.
Thermodynamics
(1) 2 credits
Prereq:
Calculus (
2), General
Physics (
1)
1. Properties of a pure substance 2. Work and heat 3. The first law of
thermodynamics 4.
The second law of thermodynamics 5. Entropy
6. Irreversibility
and availability (Prof
. Lin
, Ta Hui)
Thermodynamics
(2)/2 credits
Prereq:
Thermodynamics (
1)
1. Power and refrigeration cycles 2. Thermodynamic relations
3. Mixtures and
solutions 4. Chemica
l reactions
5. Flow through Nozzles and Blade passages
(Prof
.
Lin
, Ta Hui)
Materials
Mechanics (1)/3 credits
Prereq:
Calculus (
2), Applied
Mechanics (
1)
1. Introduction to stress, strain, and their relationships
2. Axial loading:
applications and pressure
vessels
3. Torsion
4. Flexural loading: stresses
5. Flexural
3

4
loading: deflection
6. Combined stresses and failure criteria
7. Columns
(Prof
.
Chen
, Tei Chen; Hwang, Sheng Jyei; Chue, Ching Hwei)
Materials
Mechanics (2)/3 credits
Prereq: Materials
Mechanics
(
1)
1. Theories of stress and strain
2. Advanced topics in torsion problems
3.
Thick

wall cylinders
4. Energy methods
5. Curved beams
(Prof
. Chue
, Ching Hwei)
Engineering
Graphics (1)

(2)/2 credits
1. Drawing instruments
2. Projection of points, lines an
d planes
3. Auxiliary
views of points, lines and planes
4. Intersections and developments
5.
Multiview
draws
6. Auxiliary views, isometric projection
7. Sections
(Prof. Yang, Yue Tzu;
Lin, Psang Dain; Wu, Jiun Huang)
Engineering Design/3 credits
Prereq: M
achine
Design (
2)
1. Introduction to engineering
design 2.
Engineering design
processes 3.
Creative
design 4.
Engineering
models 5.
Engineering
communications 6.
Design
considerations 7.
Design
protection 8.
Design
automation 9.
System design
10.
Design pr
ojects
(Prof. Yan, Hong Sen)
Machine Design Principles (Mechanical Engineering Design)
Basic, failure prevention application; from fundamental design
theories to
practical machine and mechanical engineering design.
Applied
Mechanics (1)/3 credits
Prereq:
Calculus (
1)
1. General
principles 2.
Force
vectors 3.
Equilibrium of
particle 4.
Force systems
resultants 5.
Equilibrium of a rigid
body 6.
Structural
analysis 7.
Internal
forces 8.
Friction 9.
Center of gravity and centroid
10. Moment of inertia
11. Vir
tual work
(Prof. Chang, Ren Jung)
Applied
Mechanics/3 credits
3

5
Prereq: Applied
Mechanics (
1)
1. Kinematics of a
particle 2.
Kinetics of a particle: force and
acceleration 3.
Kinetics of a particle: work and
energy 4.
Kinetics of a particle: impulse and
mom
entum 5.
Planer kinematics of a rigid
body 6.
Planar kinetics of a rigid body:
force and
acceleration 7.
Planar kinetics of a rigid body: work and
energy 8.
Planar
kinetics of a rigid body: impulse and
momentum 9.
Three

dimensional kinematics
of a rigid bo
dy
10. Three

dimensional kinetics of a rigid body
11. Vibrations
. (
Prof.
Huang, Chintien; Chen, Tei Chen; Chen, Yuan Fang)
Dynamics
of Machinery/3 credits
Prereq:
Mechanisms (
2)
1. Introduction
2. Static force analysis of machinery
3. Dynamic force analy
sis of
machinery
4. Power analysis of gear systems
5. Cam dynamics
6. Balance of
machinery
7. Vibration of shafts
(Prof. Chiou, Shen Tarng)
Advanced
Heat Transfer/3 credits
Prereq: Heat Transfer
1. Transient heat conduction
2. Radiative heat transfer betw
een surfaces and in
the media
3. Convective heat transfer in internal flows and external flows
Prof.
Chen, Han Taw)
Engineering Drawing
1. Engineering graphic language
2. Presentation of three

dimensional subjects by
precise graphics
3. Orthographic, pict
orial and dimensioning
4. Fitting tolerance in
mechanical
components
Robotics
and Automation/3 credits
Prereq:
Mechanisms (
2), Applied
Mechanics (
2)
1. Introduction to programming, sensing and servoing techniques
in robotics and
automation
2. 8 laboratori
es and one practice project are included
(Prof: Tsay,
Tsing Iuan)
Heat
Transfer/3 credits
3

6
1.
Introduction 2.
Introduction to
conduction 3.
One

, two

dimensional
steady

state
conduction 4.
Transient
conduction 5.
Introduction to
convection 6.
External
flow
7.
Internal
flow 8.
Free
convection 9.
Boiling and condensation
10.
Radiation
11. Heat exchangers
(Prof. Ho, C. J.; Lin, Jen Fin)
Dynamics of Machinery
1.
Introduction 2.
Force
analysis 3.
Force analysis with
friction 4.
Flywheels 5.
Balancing of
mechanis
ms 6.
Critical
speeds 7.
Power
equation 8.
Dynamics of Cam
mechanisms 9. Dynamics of gear mechanisms
10. Dynamics of Robotics
Introduction to Finite Element Method
1.
Introduction 2.
Review of solid
mechanics 3.
ANSYS getting
started 4.
Bar
and truss 5. B
eams and
frames 6.
One

dimensional
problems 7.
Plane stress/
strain 8.
Axisymmetry
problems 9.
Isoparamentric elements
10. 3

D elasticity
11. Scalar
field problems
(Prof. Chen, Lien Wen; Ho, Shi Pin)
Experiments
in Mechanical Engineering (1)

(3)/3 credits
Prereq: (1) General Physics; (2) Mechanical Materials; (3) Fluid
Mechanics,
Thermodynamics (
2)
1. Pressure
measurement 2.
Flow
measurement 3.
Power
measurement 4.
Drag
measurement on cylindrical
bodies 5.
The round turaulent
jet 6.
Temperature
measurement
7.
Measurement of thermal
conductivity 8.
Liquid fuels
analysis 9.
Bomb calorimeter, Junber
calorimeter 10.
Engine performance test (SI engine & CI
engine)
1
1
. Gas turbine test
1
2
. Steam power plant test
1
3
. COP of refrigeration
cycle
Machine
Design Pract
ice/1 credits
Prereq: Machine
Design (
1)
1. Recognition of problems
2. Data surveying
3. Synthesis of mechanisms
4.
Stress
analysis
5. Selection of materials and manufacturing processes
6.
Determination of sizes
7. Analysis and evaluation
8. Drawings and w
ritten
presentations
(Prof. Huang, Chintien; Hsu, Lai Hsing)
Engineering Japanese (1)

(2)/3 credits
3

7
(1) Pronunciation, various basic patterns of sentences, parts of
speech, names of
foreign countries and
places
, words of
foreign origin.
(2) Expressions of
'liking and disliking', 'desire', 'comparison', 'similarity', 'will',
'speculation', 'invitation', 'asking
for consent'. Expressions equivalent to 'one
must',
expressions equivalent to 'one can', expressions of one's
experience,
technical terms.
(Prof. S
hieh, Earl Chang)
Advanced Fluid Mechanics/3 credits
Prereq: Fluid Mechanics
1. Principles of irrotational flow, incompressible potential flow
(both
two

dimensional planar potential flow and three

dimensional axially
symmetric flow are discussed)
2. App
lications of complex variables and conformal transformation
to
two

dimensional planar potential flows boundary layer
theory
, flow
of
compressible fluid
(Prof
. Shieh
, Earl Chang)
Mechanical
Materials/3 credits
Prereq:
Calculus (
1)
1. Introduction and class
ification of materials
2. Material characteristics

mechanical, physical and chemical
properties
3. Mechanical property testing
4.
Crystalline imperfections and deformation5. Phase diagrams
6. Iron

iron carbide
phase diagram
7. Heat treatment of steels
8. Engineering alloys and materials
9.
Corrosion and fracture
(Prof. Lee, Hwa Teng; Su, Yean Liang; Lee, Woei Shyan)
Powder
Metallurgy/3 credits
Prereq:
Thermodynamics (
1), Mechanical Materials
1. Introduction
2. Metal powder production
3. Powder characte
rization and
testing
4. Automatic compacting
5. Sintering of metal powder
6. Post processing
for sintering
7. Compacting die and design
8. Powder metallurgy applications
(Prof.
Lee, Woei Shyan)
Engineering Materials
1. Metal working and mechanical propert
ies
2. Strengthening of materials
3.
3

8
Non

ferrous alloy:
aluminum
, copper, nickel, cobalt &
titanium alloy
4. Ferrous
alloys
: iron
& steel
5. Alloy steel
6. Ceramics
7. Polymer
8. Composite metrials
(Prof. Lee, Hwa Teng; Su, Yean Liang; Lee, Woei Shyan; Hwa
ng, Sheng Jye)
Applications of Electron Microscopy
1. Introduction
2. Theory: electron

magnetic interaction, image,
and aberration
3. TEM: thin

film, replica, extractive replica, bright and dark
field,
and SAD
pattern
4. SEM: SEI, BEI, WDS,
and EDS
5.
EPMA
6. STEM
(Prof. Lee, Hwa
Teng)
Failure
Analysis of Materials/3 credits
1. Mechanical properties of materials
2. Fracture and failure
mode 3.
Impact
fracture
4. Fracture testing
: KIC
test, J

integral, R

curve method, COD
and CTOD
method
5. Fatigue
6. C
reep
7. Radiation damage
(Prof. Lee, Hwa Teng)
Strengthening of Metals
1. Introduction
2. Theory of dislocation
3. Strength
4. Solid solution
strengthening 5.
Fine grain
6. Precipitation
hardening 7.
Work hardening
8.
Dispersion hardening
(Prof. Lee, Hwa
Teng)
Thermoelasticity
1. Mechanical and thermodynamical
foundations 2.
Uncoupled and coupled
thermoelastic theory
3. Plane strain and plane stress problems in thermoelasticity
4.
Thermal stresses in beams, plates and thin shells
5. Analysis of inelastic
thermal
stress and viscoelastic
stress 6.
Applications of variational principle and finite
element
method
(Prof. Chen, Tei Chen)
Machine
Design (1)

(2)/6 credits
prereq: (1)
Mechanisms (
1), Mechanics of Materials;
(2) Machine Design(1),
Mechanisms(2)
(1
)
Introduction
, stress analysis, strain analysis,
statistical considerations
,
materials and manufacturing methods, strength
of machine parts, tolerance
and fit, screws, fasteners
and connections
, welding and bonded joints.
3

9
(2
) Springs
, rolling contact beari
ngs,
lubrication
and
journal bearings
, spur gear,
Helical, Bevel and Worm gears, shaft,
clutches, brackets and couplings,
flexible mechanical
elements, mechanical systems.
(Prof. Li, Ke Yang; Wang,
Ting San; Chen, Ja Hau)
Numerical
Control Machines/3 cred
its
Prereq: Mechanical Manufacturing
1.
Introduction 2.
Principles of numerical control
: structure
of N.C. machines
,
classification
of N.C. systems, coordinate system and machine
axes, N.C. tape
format
3. Basic concepts of N.C. part programming
4. Milling
part programming
and practice
5. Lathe part programming and practice
6. Computer aided part
programming and practice
7. Interpolation and curve fitting
8. Hardware of
numerical control: control system, control device,
machine tool structure and
precision
9
. Future trends
(Prof. Lee, Rong Shean)
Precision
Manufacturing Technology and
Measurements
/
3
credits
Prereq: Mechanical
Manufacturing (
2), Experiments in Mechanical Engineering
1. Introduction of Precision Engineering
2. Metal Cutting Theory
3. Grinding
Theory
4. Economic Analysis of Machining
5. Sensors for Metal Machining and
Automation
6. Non

Traditional Machining Processes
7. Metrology Theory and
Technology
8. Precision Measurement System
9. Design of Ultra

Precision
Machine Tools
(Prof. Lin, Jehn Mi
ng)
Experiments in Mechatronic System
Experiments
designed
to illustrate the integration of mechanical
and electronic
systems. Measurement techniques, A/D and D/A
conversion, calibration, timing of
controls, characterization of
sensors and control circuit
s. Applications in robots,
electromechanical, pneumatic, and hydraulic systems.
(Prof
. Chen
, Chao Kuang;
Tsay, Tsing Iuan)
Mechanical Materials
1.
Introduction
2.
Atomic Structure Atomic Bonding in Solids
3

10
3.
Structures of Metals and Ceramics
4.
Polymer Structures
5.
I
mperfections in Solids: Defects, dislocations, G.B. etc
6.
Diffusion
7.
Mechanical Properties: metals, ceramics and polymers
8.
Deformation and Strengthening Mechanisms: metals, ceramics and
polymers
9.
Phase Diagrams
10.
Phase Transformations
11
Types and Applications o
f Materials: metals/ alloys, ceramics and polymers
(Prof. Chung, Chen

Kuei)
Mechanical Drawing
1.
The standard of general mechanical graphics
2.
Principles of
dimensioning
3.
Principles of precision
dimension
s
4.
Mechanical working drawings
5.
Mechanical component drawi
ngs ( Fastening, joining, and standard parts)
(Prof. Chung, Chen

Kuei)
Automatic Control / 3 Credits
Prereq: Engineering Mathematics (2)
Introduction to control systems
Mathematical Models
Feedback Control and Time Response
Frequency Response
Stability of
Linear Systems
Root Locus
PID Controller Design
Lead/Lag Compensator
Digital Control Systems
Experiments
(Prof.
Tsai, Nan

Chyuan
)
3

11
Electronics/ 2 Credits
Prereq: Electrical Engineering
Introduction of Electronic Elements
RC and LCR circuit
Diode and Its
Applications
BJT and Its Properties
CE, CB and CC Transistors
FET Elements
Frequency Response
OP Amplifier
Digital IC and Circuits
Oscillators
(Prof.
Tsai, Nan

Chyuan
)
Fundamentals of Automotive Vehicle Crash Mechanics/ 3credit
1. Introduction: Crash Sign
ature and Typical Testing Method, Coordinate System,
Sensor, and Digital Filter. 2. Crash Pulse and Kinematics. 3. Analysis of Crash Test
Data: Vehicle Response, Occupant Response

Dummy Calibration and Testing
Response Analysis. 4. Injury Index
(Prof.
Hua
ng, Tsai

Jeon
)
CAD Applications/ 3credits
1. Introduction. 2. Create 3D solid model by using existing software:
Components and Assembly. 3. Generate drawing from 3D solid model 4. Computer
Aided Manufacture 5. Develop the NC machine from 3D solid model 6.
FEA
Modeling: Static and Dynamic Analysis
(Prof.
Huang, Tsai

Jeon
)
GRADUATE COURSES
Applied
Plasticity/3 credits
1. Introduction: scope and applications
2. Plastic constitutive equations
3.
Plastic material testing
4. Basic equations for plasticity
5.
Analytical methods for
3

12
plasticity problems
6. Slip

line field method
7. Upper bound method
8.
Visioplasticity method
9. Finite element method
(Prof. Lee, Rong Shean)
Internal
Combustion Engines/3 credits
1. Engine types and their
operation 2.
Engine desi
gn and operating
parameters 3.
Thermochemistry of fuel

air
mixtures 4.
Properties of working
fluids 5.
Ideal
models of engine
cycles 6.
Gas exchange
processes 7.
SI engine fuel metering and
manifold 8.
Charge motion within the
cylinder 9.
Combustion in spa
rk

ignition
engines
10. Combustion in compression

ignition engines
11. Pollutant formation
and control
12. Engine friction and lubrication
13. Modeling real engine flow and
combustion processes
14. Engine operating characteristics
(Prof. Chiu, Cheng
Ping)
Theory of Vibration
Principle of mathematical modeling, vibration of a single degree
system,
introduction to advanced dynamics, generalized eigenvector and
eigenfunction
expansion, vibration of a multiple degree system,
vibration of a continuous system,
a
pproximation methods and Rayleigh
quotient.
Engineering
Analysis/3 credits
Eigenfunction expansion: vector space, functional space,
generalized Fourier
series, Sturm

Liouville problems,spectrum
theorem of an operator, special
functions
Integral transform
: applications of Fourier, Laplace,
Hamilton and Mellin
transform
Green's function: Green's function of ordinary and partial
differential equation,
generalized Green's function
Calculus of variation: Euler

Largrange equation, Sturm

Liouville problems,
H
amilton's principle, boundary value
problems, the Rayleigh

Ritz method, the
Galerkin method, a
semidirect method
Integral equation: the Neumann series, Green's function,
Fredholm theory,
Hilbert

Schmit theory, Mercer's theorem,
singular integral equation
(Prof.
Chen, Chao Kuang; Lee, Sen Yung)
3

13
Introduction to Polymer Processing
1. Introduction to polymeric materials processing
2. Introduction to properties of
polymeric material
3. Introduction to mathematical simulation
4. Basic
mathematical equation
5. P
olymeric flow variable basic properties analysis
6.
Polymeric materials process heat transform analysis
7. Polymeric materials process
mechanics analysis
8. Example discuss
(Prof. Hwang, Sheng Jye)
Multi

Rigid Body Dynamic
1. Introduction to multi

rigid b
ody system research
2. Rigid body dynamics
3.
Basic rigid body system
4. Generally multi

rigid body system
5. The impact
problem of multi

rigid body system
(Prof. Ju, Ming Shuang)
Cooling Technique of Electronic Equipments
1. Judgement of cooling requirem
ent condition
2. Transform cooling of base and
circuit plane3. Cooling technique of electronic element
4. Cooling of small
computers, microcomputers and microprocessors
5. Rapidly cooling of electronic
system
6. Special application of cooling process
Mech
anical Logical Control System
1. Introduction to automatic Machine
2. Basic theory of logical control

Boolean
algebra
3. Electronic logical control circuits
4. Relay control circuits
5. Hydraulic
& Pneumatic logical control circuits
6. Programmable contr
oller & control
instruction
7. Microcomputer logical control
8. Practice controller design
Control of Biological System
1. Introduction

motor system, central nervous system
2. The mechanic property
of muscle
3. Movement unit
4. The sensation of muscles,
joints and skin
5. The
reflective loop of the vertebra column and its
function 6.
The forward and
backward paths of vertebra column
7. Cerebellar cortex
8. The
cerebellum 9.
Base
neuro node
(Prof. Ju, Ming Shuang)
Robust Control
3

14
1. Introduce the system d
esign idea of stability and function
robustness
2.
Quantify the robustness in order to be calculated and
estimated
3. Utility the design
methods and apply example explains the
design points and characteristics of the
robustness controller
(Prof. Tsai, Ming
Chi)
Polymeric Materials and their Mechanical Properties
1. Introduction to polymeric materials
2. Introduction to individual properties of
polymeric
materials
3. Molecular properties of polymeric materials
4. Structure of
polymeric materials
5. Chemical
properties
of polymeric materials
6. Physical
properties
of polymeric materials
7. Mechanical properties of polymeric materials
Hyperelasticity
Viscoelasticity
Creep
Non

Newtonian fluids
Modeling & Simulation of Dynamic System
1. Introduction to system si
mulation
2. Physical system simulation and
experiment
3. Physical system dynamic response simulation and analysis
4. Digital
simulation technique
(Prof. Chang, Ren Jung; Shih, Ming Chang; Ju, Ming Shaung;
Tsai, Ming Chi)
Signal Measurement & Control/3 cre
dits
1. Introduction to measurement and control
2. Signal sense interface
3. Signal
conduct, analysis, processed
4. Control signal generated and analysis
5.
Measurement and control system integrated design
Mechatronics
1. Introduction to mechanic
properti
es 2.
Mechatronic signal conversion
3.
Mechatronic actuated energy conversion
4. Mechatronic elements match and
interface
5. Mechatronics system design
(Prof. Chen, Chao Kuang; Chang, Ren
Jung)
Solar Energy Engineering
1. Basic theory of solar energy radi
ation
2. Basic theory of solar energy system
fluid mechanics and heat transfer
3. Solar energy collector of plane type
4. Solar
energy collector of collective type
5. Solar energy adding heat system
6.
Ec
o
nomical analysis of solar energy system
,
(Prof. Che
n, Han Taw; Wu, Chih
3

15
Yang)
Random
Dynamic Data Analysis/3 credits
1. Scope of random data
analysis 2.
Basic statistic
principle 3.
Random data
a
c
quisition and
storage 4.
Random data
processing 5.
Random data
estimator 6.
Fourier
analysis 7.
Spectral
analy
sis 8.
Relativity
analysis 9.
Applications of
ARMA/ARMAX model
10. Max. distribution estimate
(Prof. Chang, Ren Jung)
Feedback Control System Design
1. Introduction to feedback theory
2. Feedback time

domain design
3. Feedback
frequency domain design
4. S
tate space design
5. Digital feedback design
(Prof.
Tsai, Ming Chi; Chang, Ren Jung)
Stochastic
Control/3 credits
1. The
theory of stochastic controls
2. Background in probability theory
3.
Introduction to random processing
4. Random integral/
differential
& derivative
equation
5.
Stochastic
system response
6. Kelvin
filters
7. LQC analysis
8.
Nonlinear stochastic control design
(Prof. Chang, Ren Jung)
Fundamentals of Metal Cutting/3 credits
1. Machine Tools and Machining
Operations 2.
Mechanics of Metal Cu
tting 3.
Temperatures in Metal
Cutting 4.
Tool Life and Tool
Wear 5.
Cutting Fluids and
Surface
Roughness 6.
Economics of Metal Cutting
Operations 7.
Chip
Control 8.
Grinding 9.
Theory of Machining Chatter
10. Machine Tool Structure Dynamics
11.
Cutting Pr
ocess Dynamics
(Prof. Lin, Psang Dain)
Advanced Polymer Processing
1. Dynamic response of polymeric m
ate
rials
2. Measurement of rheological date
of polymeric
materials 3.
Constitutive equations of polymeric materials
4.
Curvalinear coordinate
5. Convected
coordinate
6. Differential form of constitutive
equations 7.
Integral form of constitutive equation
8. Summary of
constitutive
equations
9. Case study of polymer processing
(Prof. Hwang, Sheng Jye)
Mechanics of Metal Working
3

16
1. Stress and
Strain 2.
Yield
criteria and
Plasticity 3.
Strain
hardening 4.
Strain
rate and Temperature
effects 5.
Plastic
work 6.
Slab analysis for rolling, extrusion
and
drawing 7.
Upper bound
method 8.
Slip

line field
theory 9.
Formability
10.
Bending
11. Cupping
12. Sheet metal f
orming
Theory
of Gearing/3 credits
This course covers principles and problems in gearing from a
theoretical
viewpoint. The analysis and synthesis of gearing and other
topics in gear design are
investigated. Mathematical emphasis is on
plane curves, conjug
ated shapes,
surfaces
, and
conjugated surfaces. The
background of basic differential geometry is
considered (though not
necessary) helpful for understanding the materials covered
in this
course. Even though this course covers mainly plane gearing, students
can
easily apply similar techniques to the study of spatial gearing.
1. Coordinate transformation and its applications
2 homogeneous
transformation
Generation of curves and surfaces in matrix representation
3
Transformation
of motion
2. Plane curves
1
De
finition and parametric representation
2
Tangent
, normal
and
curvature
3. Coujugate shapes
1
Locus of curves
2
Envelope of locus of curves
3
Determination of conjugate shapes
4. Plane gearing analysis
1
Equations of tooth shape tangency
2
Analysis of
meshi
ng
5. Basic kinematic relations of plane gearings and their
Application
1
Basic
kinematic relations
2
Relations between curvatures of conjugate shapes
3
Relations between centrode
and shape
curvatures
4
Conditions of tooth
nonundercutting
6. Generation of
conjugate shapes
1
Principles of generation of conjugate shapes
2
The Camus theorem
3
Evolute of conjugate shapes
7. Surfaces and conjugate surfaces
8. Survey of current research
(Prof. Huang, Chintien)
Mechine
Tools Dynamics/3 credits
1. Vibration of dis
crete and continuous systems
2. Dynamic characteristics of
3

17
cutting process & machine tool structure
3. Stability analysis of machining system
4.
Dynamic analysis of drive system and components
5. Adaptive control of cutting
process
6. Monitoring and contro
l of machining system
(Prof. Wang, J. J.)
Metal
Cutting Dynamics/3 credits
1. Review of basic orthegonal and oblique cutting process
2. Mechanics of wave
generating cutting process
3. Mechanics of wave removing cutting process
4.
Convolution
modeling
of m
illing process
5. Frequency domain analysis of milling
force pulsation
6. Effects of cutting parameters and tool shape on cutting force
and
cutting stability (chatter)
7. Effects of cutting conditions on dimensional accuracy
of
workingpiece
8. Monitoring a
nd control of cutting process (Prof. Wang, J. J.)
Applied Mechanics (2)/3 credits
1. Rigid body dynamics in 3

dimensional motion
2. Modal analysis of discrete
system vibration
3. Introduction to continuous system vibration
4. Introduction to
variational a
nd Hamiltions principle
5. Euler and Lagrange's equations of motion
Linear Algebra
1. Introduction to numerical analysis
2. Roots of algebraic and transcendental
equations
3. Solution of simultaneous algebraic
equations 4.
Curve fitting
5.
Numerical inte
gration and
differentiation 6.
Numerical integration of ordinary
differential equations: Initial

value problems7. Numerical integration of ordinary
differential equations:
Boundary

value problems
8. Introduction to partial
differential equations
Modern
Co
ntrol Theory/3 credits
1. State space representation of control systems
2. Structure of linear systems
3.
Control of linear time

invariant systems
4. Asymptotic observer and dynamic
compensator design
5. Stability of control systems
(Prof. Ju, Ming Shuang)
Automatic Control Engineering/3 credits
1. Introduction
2. Laplace transform and matrix
3. Dynamic modeling of
physical systems
4. Transfer function and block diagrams
5. Transient analysis of
control systems
6. Stability analysis: root locus
7. Frequency
analysis
8. Industrial
3

18
controllers
9. Design of control systems
(Prof. Shih, Ming Chang; Ju, Ming
Shaung)
Heat Power Lab Testing (senior)
1.
Pressure,
speed and time measurement
2. Power measurement
3. Analysis of
products of combustion
4. Heat transfer
tests
5. Automobile engine performance
tests
6. Testing of reciprocating air compressor
Heat
Exchanger Design/3 credits
1. Classification of heat exchangers
2. Heat transfer analysis of various heat
exchangers
3. Pressure drop analysis of various heat e
xchangers
4. Computer

aided
design and optimization
5. Transient responses of heat exchangers
6. Flow

induced
vibrations of heat exchangers
(Prof. Jang, Jiin Yuh)
Design Methodology
1. Introduction to design
2. Design processes
3. Conceptual design and
in
novation
4. Quantitative and systematic methods for design
5. Intelligent and
knowledge

based systems for design
6. Information integration and management
7.
Human interface aspects in design
Tribology
/3 credits
Friction, wear and lubrication, theories an
d practices of
interacting surfaces in
relative motion
. (
Prof. Li, Ke Yang)
Trilogy
Research/3 credits
Tribological system research; special topic study in mechanical
engineering
problem related to friction, wear and lubrication.
(Prof. Li, Ke Yang)
Expe
rimental
Stress Analysis/3 credits
1.
Stress,
strain
2. Strain gages
3. Photoelasticity
4. Holographic interferometry,
speckie photography, Moire' Method
(Prof. Chen, Yuan Fang)
Digital Image Processing
3

19
1. Basic
principles 2.
Algorithms for filtering, edg
e detection, segmentation,
enhancement
, etc
3. Applications of digital image processing: visual inspection,
measurement,
and interferogram
analysis
Advanced
Kinematics of Machinery/3 credits
1. Introduction
2. Basic concepts of mechanisms
3. Kinematic ana
lysis of spatial
mechanisms
4. Kinematic synthesis of spatial mechanisms
5. Special topics: Spatial
mechanisms
(Prof. Chiou, Shen Tarng)
Viscous
Fluid Flow/3 credits
1. Fundamental laws of fluid flows
2. Exact solutions of Navier

stokes equations
3. Low R
eynolds number flows (Stokes flow, Oseen flow)
4. High Reynolds
number flows (boundary layer theory)
5. The exact and approximate solutions of
boundary layer flows
6. Jets and wakes
(Prof. Jang, Jiin Yuh)
Statistical Thermodynamics
1. Classical mechanics
2. Theory of relativity
3. Quantum mechanics
4.
Statistical mechanics of a system of independent particles
5. Distribution laws
6.
Partition function and thermodynamics
7. Classical statistical mechanics and the
kinetic theory of
gases
8. Statistical mecha
nics and chemical equilibrium constant,
viscosity, thermal conductivity, diffusion coefficient of
ideal gases
Fluid Power Control
1. Introduction
2. Basic hydraulic restriction flow control
3.
Mechanical

hydraulic servovalves and electro

hydraulic
servova
lves
4. Servovalve
control actuator systems
5. Servopump control actuator systems
6. Pressure and
flow control valve design analysis
7. Pneumatic servo

control system analysis
Digital Control System Analysis and Design
1. Introduction
2. Discrete

time sys
tems and the z

transform
3. Sampling and
construction
4. Open

and closed

loop discrete

time systems
5. System time
response characteristics
6. Stability analysis techniques
7. Optimal control design
3

20
Optimal
Control/3 credits
1. Overview 2. Review of opti
mization theory 3. Problem formulation,
constraints and performance 4. Bellman's principle of optimality, recurrence
relation and
dynamic
programming 5. Computational procedure for dynamic
programming, discrete
linear regulator problems 6. Hamilton

Jacobi

Bellman
equations, continuous linear regulator
problems 7. Calculus of variations 8.
Necessary conditions, linear regulator problems 9. Pontryagin's maximum principle,
state inequality constraints
10.
Minimum

time problems, minimum control

effort
problems
11. Singular intervals in optimal control problems
12. State estimation &
Kalman filters
13. LOG problems
14. Numerical solution of two

point boundary
value problems
(Prof. Ju, Ming Shaung)
System Identification/3 credits
System identification deals with
the problems of building
mathematical models
of dynamical systems based on observed data from
the systems. This course is
aimed at giving an understanding of
current system identification methods, their
rationale, properties and
use. Both the basic princi
ples and practical aspects of
system
identification will be given in great detail.
(Prof
. Ju
, Ming Shaung)
Adaptive
Control Theory/3 credits
1. Introduction of adaptive systems
2. Real

time system identification
3. Model
reference adaptive control systems
4. Self

tuning regulators
5. Stability,
convergence, and robustness of adaptive systems
6. Auto

tuning & gain scheduling
7. Applications
(Prof. Ju, Ming Shaung)
Theory
of Elastic Stability/3 credits
1. Stability of mechanical systems
2. Stability of colu
mns
3. Buckling of thin and
thick
plates 4.
Buckling of thin
shells 5.
Post

buckling behavior of plates & shells
6.
Stability of nonconservative systems
(Prof. Chen, Lien Wen)
Plasticity
Introduction:
1.
Hysteresis effect, Bausinger effect, combined stre
sses
.
3

21
2. yield
criteria
Plastic stress

strain relations: Incremental and deformation
theories
3. Elasto

plastic problems in plane, cylindrical and spherical bodies: Successive
approximations
4. Slip line field and applications
5. Limit design analysis
6. A
pplications in metal forming: Drawing, extension, rolling,
and forging.
Magnetohydrodynamics
1. Introductions: Plasma, Lamour radius, Debye length, Plasma frequency,
Magnetic Renolds Number, magnetic Mach numbers, Hartmann numbers
2. Electrodynamic equati
ons: Maxwell equations, electromagnetic stresses,
and
electromagnetic energy
3. MHD equations: MHD simplifications, and boundary conditions
4. Static solution and application of MHD equations: Squeeze effect
5. Steady state solutions and applications of MH
D equations: Hartmann flow,
channel flow, lubrication flows
6. Unsteady state solutions of MHD equations: Plane electromagnetic waves,
shock waves, Alfoeu waves
Hydrodynamic Stability Theory
1. Basic concept: stability, natural stability, interchange prin
ciple of
instability,
supercritical stability
2. Raleigh

Taylor instability
3. Bernard problems
4.
Instability problems of Coustte flows
5. Instability problems due to surface tension
6. Instability problems of parallel flows
7. Instability problems due to
stratified
distributions of viscocity
8. Instability problems due to periodic excitations
(Prof.
Weng, Cheng I)
Nonlinear
Vibrations/3 credits
1. Principle of mathematical modeling
2. Characteristic of a nonlinear
differential
equation
3. Phase plane and
stability analysis
4. Perturbation method
5.
Nonlinear forced vibration of
a
one

degree
freedom system
6. Parametric and
self

excited vibration system
7. Liapunov stability theorem
8. Bifurcation and
3

22
catastrophe theorem
(Prof. Lee, Sen Yung)
Theory of El
astic Waves
1. One

dimensional motion of an elastic continuum
2. The linearized theory of
elasticity
3. Elastic waves in an unbounded medium
4. Elastic waves in elastic
half

space
5. Forced motions of a half space, diffraction, thermal,
viscoelastic and
no
nlinear effects
Computer

aided Mechanical Engineering
Methodology and practice in computer

aided design of components
and systems
utilizing principle of several mechanical engineering
disciplines.
Mechanical Design of Robotic System
Principle of hardware
and software design of industrial robots
and spatial linkage
devices, includ
ing
an actual robotic programming
project.
(Prof. Tsai, Ming June)
Kinematic
Geometry of Robot Manipulators/3 credits
1. Introduction of screw theory
2. Plucker coordinate
3. Mob
ility analysis
4.
Singularity configuration
5. Reciprocal connection and their applications to
kinematic/static
analysis in spatial linkage
(Prof. Tsai, Ming June)
Special
Topics on Mechanism Design/3 credits
1. Introduction to mechanism
design 2.
Mechani
sm and machine design
processes 3.
Creative mechanism
design 4.
Number synthesis of
kinematics
chains
5.
Generalization of
mechanism 6.
Specialization of
mechanism 7.
Singular
configurations of
mechanism 8.
Movable overconstrained
mechanism 9.
Computer

aid
ed mechanism design
10. Design projects
(Prof. Yan, Hong Sen;
Huang Chintien)
Design Methodology
1. Introduction to design
2. Design processes
3. Conceptual design and
innovation
4. Quantitative and systematic methods for design
5. Intelligent and
knowled
ge

based systems for design
6. Information integration and management
7.
3

23
Human interface aspects in design
Instruments and Measurements
1. Introduction
2. The analog measurement and its time

dependent
characteristics
3. Measuring system
response 4.
Senso
rs
5. Signal conditioning
6. Characteristics
of digital measurement
7. Standards of measurement
8. Error analysis
(Prof. Ho, C.
J.)
Computational
Fluid Dynamics/3 credits
1. Introduction
2. Concept of finite difference method
3. Basic equations
4.
Turbule
nce
modeling 5.
Finite difference methods for incompressible flow
6.
Compressible
flow
(Prof. Ho, C. J.)
Optimum
Design/3 credits
1. Introduction
2. Problem formulation
3. Optimum design concepts
4. Linear
programming
5. Numerical methods for unconstrain
ed optimum design
6.
Numerical methods for constrained optimum design
7. Interactive design
optimization
8. Practical design optimization
(Prof. Chiou, Shen Tarng)
Finite
Element Method/3 credits
This course will introduce the fundamental theory of the fin
ite
element method
and train students using Fortran to finish a finite
element program independently.
Course content
: introduction
to the
finite element method, one

dimensional
problems, development of a
finite element program, two

dimensional problems,
t
wo

dimensional
element calculations,
and extensions.
(Prof
. Lai
, Hsin Yi)
Application of Finite Element Method
1. Introduction
2. Using ANSYS modeling
3. Vector field problems (review of
elasticity, bar, truss, beam,
frame, plane stress/strain, axisymmetr
y problems, 3

D
elasticity)
4. Using ANSYS
adaptive meshes
5. Solver (profile solver, frontal solver,
iterative solver,
comparison)
6. Nonlinear problems
7. Dynamic problems
8.
Eigenvalue problems
(Prof. Chen, Lien Wen; Ho, Shi Pin)
3

24
Engineering Statistics
1. Basic data
analysis 2.
Frequency
histogram 3.
The average, sample variance
and sample standard
deviation 4.
Theoretical probability
distribution 5.
Probability
density 6.
Population mean
variance 7.
Normal
distribution 8.
Standard normal
distribution 9
.
Distribution of average
10. The t

distribution confidence interval
11.
Statistical tests
12. T

tests, blocking and randomization
13. Two

level factorial
designs
14. Two level three variable
design 15.
Fractional
factorial
design
16.
Matrix algebra
17. Re
gression analysis
18. Response surface methodology
19.
Probability
20. Binomial and Poisson
distribution 21.
Single sampling plane22.
Control charts
23. Time series analysis
Advanced Engineering Thermodynamics
1. Fundamentals
2. Mathematical preliminaries
3. Equilibrium of thermodynamic
systems, energy and entropy
4. Thermodynamic properties of systems of constant
chemical
composition
5. Thermodynamic properties of ideal gases and ideal gas
mixtures
of constant composition, thermodynamic properties of gas
mixtures with
variable compositions
6. Applications of thermodynamics to special systems
7.
Irreversible thermodynamics
Fundamentals
of Combustion/3 credits
1. Combustion process
2. Combustion thermodynamics
3. Chemical
kinetics 4.
Rankime

Hugoniot
relati
ons 5.
Premixed flame, diffusion flame, ignition,
quenching and
flammability limits
6. Explosion
7. Gaseous detonations
8. Spray
combustion
9. Environmental pollutants
(Prof. Lin, Ta Hui)
Theory
of High Strain Rate Deformation/3 credits
1. Dynamic aspects
of mechanical teating
, testing
techniques at
impact rates of
strain, longitudinal elastic wave propagation
torsional elastic wave propagation,
plasticity concepts
2. Deformation mechanisms
3. Dislocation mechanics at high
strain rates
4. Dynamic effects in
deformation twinning
5. Adiabatic shear bands
phenomena
6. Shock wave effects
7. Relation between microstructure and
mechanical behavior
8. Constitutive equations and modeling
9. Applications:
structural integrity and dynamic plastic
behavior of structur
es
(Prof. Lee, Woei
Shyan)
3

25
Impact
Fracture Mechanics/3 credits
1. Introduction to impact phenomena
2. Material failure at high strain rates
3.
Material characterization at high strain rate
4. Introduction to penetration
mechanics
5. Long

rod penetration m
echanics
6. Analytical models for kinetic
energy penetration
7. High velocity impact dynamics
8. Experimental methods for
terminal Ballistics and impact
physics
9. Survey of computer codes for impact
simulation
(Prof. Lee, Woei Shyan)
Special Topics on Ma
terials
Panel discussions and lectures in the study of special topics
related to materials
and factories
: heat
treatment, superalloy,
metallographic microstructure,
microanalysis, failure analysis, case
study and trouble shooting.
(Prof. Lee, Hwa
Teng)
Me
tal
Physics/3 credits
1. Crystal structure: lattice, millers, indices, defects.
2. Phase equilibrium
: solid
solution, intermettalic phase.
3. Dislocation: slip, strength, Burger vector,
dislocation
movement, critical shear stress, interaction.
4. Mechanic
al properties:
plastic
deformation, twin, yielding
, strengthening
mechanisms, fatigue, creep.
5.
Diffusion.
6. Corrosion and fracture.
(Prof. Lee, Hwa Teng)
Special
Topics on Metal Forming/3 credits
Tooling design concepts in metal forming, physical modeli
ng of
metal forming,
mechanics of metal forming, formability test and
analysis, tribology of metal
forming, CAD/CAM in metal forming, and
superplasticity superplastic forming,
powder forging
and
extrusion,
expert systems for metal forming, recent
technolog
ical
development
in metal forming
. (
Prof
. Lee
, Rong Shean)
Computer

Aided Manufacturing/3 credits
1.
Introduction 2.
CAD/CAM
systems 3.
Geometric
modeling 4.
Principles of
numerical
control 5.
CAD/CAM
software 6.
Computer controls in NC (CNC, DNC,
adaptiv
e control
) 7.
Industrial robots

technology and
applications 8.
Group
technology and process
planning 9.
Computer aided process planning
10. Computer
3

26
process control
11. Computer aided quality control
12. Computer integrated
manufacturing systems
(Prof. L
ee, Rong Shean)
Geometric
Modelling and its Applications/3 credits
1. The description of geometric shape and size, such as curves,
surfaces and
solids of mechanical objects.
2. The transformations operations of geometric shape.
3. The study of current geo
metric
modeling
system and their
capabilities 4.
The
study of contemporary development and future trends.
(Prof. Hsu, Lai Hsing)
Mechanics
of
Materials
(2)/3 credits
Deals
with the application of basic elasticity theory on
the torsion
, thick

walled
cylind
er and column buckling problems. The
material failure design criteria and
energy, methods are also
included.1. Theory of Elasticity
2. Torsion
3. Yield and
Fracture Criteria
4. Buckling Theory for
Column
5. Energy Methods
(Prof. Chue,
Ching Hwei)
Mechanic
al Material
1.
Introduction 2.
Mechanical
Testing 3.
Structure 4.
Phase Equilibrium
Diagram
5.
Atomic
Diffusion 6.
Solidification 7.
Strength and
Deformation 8.
Strengthening
Mechanism 9.
Heat Treatment
10. Alloy Steels
11. Cast Irons
12. Corrosion and
Deg
radation
Metal
1.
Introduction 2.
Crystal
Structure 3.
X

ray
Diffraction 4.
TEM 5.
SEM 6.
Diffusion 7.
Dislocation 8.
Solidification 9.
Metal Strengthening Mechanism
10.
Metal Degradation
(Prof. Lee, Hwa Teng)
Steel
Material/3 credits
1. Manufacturing
2.
Heat Treatment
3. Specification
4. Structural Stells
5. Tool
Steels &Die Steels
6. Stainless Steels
7. Cast Irons
(Prof. Lee, Hwa Teng; Su, Yean
Liang; Lee, Woei Shyan)
Fracture
Mechanics/3 credits
3

27
Fracture Mechanics deals with the analysis of fracture be
havior
for cracked body.
It contains the general
introduction
, Linear
Elastic Fracture
Mechanics
,
Elastic

Plastics Fracture Mechanics,
Fatig
u
e Crack, and the Numerical (eg. finite
element method
Fracture Mechanics.
(Prof
. Chue
, Ching Hwei)
Mechanical Des
ign of Robotics System
1. Introduction to Robotics System
2. Structural Design of Manipulators
3.
Kinematic Analysis
4. Dynamics Analysis
5. Trajectory Planning
6. Programming
7.
Control Algorithms
8. Robotics Vision and Sensing
9. Design Project and Syste
m
Integration
(Prof. Tsai, Ming June)
Robotics and Automation
1. Introduction
2. Geometric Structure of Robots
3. Kinematics of Robotics
4.
Robotics Programming Language
5. Robotic Task
Planning 6.
System Integration
and Implementation
7. Experiments
(Pro
f. Tsai, Ming June; Tsay, Tsing Iuan)
Nonlinear
Control/3 credits
Nonlinear system
analysis:
phase plane analysis, describing
function analysis,
and Lyapunov analysis. Nonlinear control
system
design:
feedback linearization,
sliding mode control, and
gain
scheduling.
(Prof
. Tsai
, Tsing Iuan)
Dynamic
system Modeling and Indentification/3 credits
Generalized approaches to developing models for describing
complex dynamic
interactions between mechanical, electrical, and
thermal systems. Basic
identification t
echniques and algorithms.
(Prof
. Tsai
, Tsing Iuan)
Screw
Theory and
its
Application/3 credits
1. Introduction of 3

D geometry and mechanisms. Elementary 3

D
displacement.
Dulity between statics and kinematics.
2. Plucker line coordinates, line geometry
a
nd 3

D
algebratic curves.
3. Screw systems and special screw systems.
4.
Screw and dual vectors.
5. Mobility analysis of linkages and overconstrained
linkages.
6. Special configurations.
7. The applications of the screw system.
8.
Reciprocal connecti
ons.
9. The Jacobian and matrix of cofactors.
10. Contact and
3

28
grasping wrench s
c
rew system.
11. Finite screw system.
(Prof. Tsai, Ming June;
Huang, Chintien)
Computer

Aided Mechanical Design
1.
Introduction to CAD system.
2. Introduction to CAD/CAM/CAE appl
ied
software.
3. 3

D space geometry data structure.
4. Numerical analysis
methods for mechanical problems.
5. Computer

aided mechanism design.
6.
Special topics.
(Prof
. Tsai
, Ming June)
MEMS Technology and Integration
1.
Introduction to MEMS/MST
2.
Basic semic
onductor/IC process
3.
Bulk micromachining
4.
Surface micromachining
5.
LIGA/LIGA

like
technology
6.
CMOS micromachining
7.
Micro mechanical machining
8.
Integration of MEMS technology
9.
Case study
(Prof. Chung, Chen

Kuei)
to be announced, Spring term, 2004
(Prof.
Tsai, Nan

Chyuan
)
the Technologies of Semiconductor Fabrication Processing and Equipment
1. Introduction
2.
Thermal Oxidation and Diffusion Processing and Equipment
3.
Deposition Processing and Equipment
4.
Lithography Processing and Equipment
5.
Etch Processing and Equipment
6.
Iron Implantation Processing and Equipment
7.
Rapid Thermal Processing and Equipment
8.
Wafer Planarization Processing and Equipment
3

29
9.
Process Integration
10.
Plasma Techniques
11.
Mass Flow Controller and Gas Panel
12.
Vacuum Technology
13.
Tool Automation
14.
Future Development and
Prospectives
(Prof. Hsu, Jyue

Liang)
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