Design of Small Chemical Vapor Deposition System for Materials ...

crookedjourneyMechanics

Oct 24, 2013 (3 years and 8 months ago)

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Shamil Baldeosingh

Dasney Joseph

Walter McKinley


March 4
th

, 2010

EML 4905 Senior Design Project

Advisor: Dr. K. H. Wu

March 24, 2010

1


Background


Problem Statement


Design Specifications


Conceptual Designs


Project Management


Future Plans

2


Chemical Vapor Deposition ( CVD )



Widely used for engineering applications



Scalable to industrial production


20
-
100 % yield




Controllable parameters to determine properties


3


Large Research Interest



Properties


Mechanical


Electrical


Thermal


Novel Applications



Variations


Dimensions and Geometry


Quality and Yield


Zhao
et al.
,
Physical Review Letters
,

4


CNT synthesis for current CVD system


3 hours for sample size of 1


5 grams


Furnace heating of entire reaction chamber


Such a large sample size is not necessary for research




CNT synthesis for proposed CVD system


0.5 hours for sample size of less than 1 gram


Localized heating of gases and substrate


Appropriate for research applications



5


Preheated Gas Temperature


At least
400

̊c


Substrate Temperature


600
-
1000

̊c




6





Volumetric flow Rate
(
mL
/min)

PROCESS GAS

Hydrogen (H
2
)

400

PRECURSOR GAS

Acetylene (C
2
H
2
)

100

CARRIER GAS

Argon (
Ar
)

600


Packaging


Accessibility


Substrate should be easily loaded


Maintenance of system


Gas flow


Reynolds number << 2100 : Laminar Flow


Peclet number << 1


Knudsen number > 1


7

8

9

10

Design A

Straight Tube

Design

B

Variable Cross
Section Tube

Design C

Cube

Packaging

4

4

1

Accessibility

5

5

1

Gas

Flow


3

2

4

Price

1

2

5

Excellent


1

Very Good
-
2

Good


3


Fair


4


Poor
-

5

11


Substrate Material


Wafer


Powder




Resistive Heating
Element


Material


Configurations


Life span




Thermal Strength


Thermal Shock



Thermal Expansion


Deflection



Power Input


AC vs. DC


H
-
Current/ L
-
Voltage


L
-
Voltage/H
-
Current


12


Heat Generation


Dasney

Joseph



Instrumentation and Fluid Mechanics


Shamil

Baldeosingh



Conceptual Designs and Prototype


Walter McKinley

13

Gantt Chart
-
Spring 2010

14

15

Gantt Chart
-

Fall 2010

16

0
5
10
15
20
25
TIME (hours)

January
February
March
April
SHAMIL

DASNEY

WALTER


Design Modeling


SolidWorks



Simulation


ANSYS CFX


Fluid Mechanics


Heat Transfer from Resistive
Heating Elements


Instrumentation and
Control


LabVIEW


Thermocouple


Infrared Temperature
Sensor


Mass Flow Controller



Prototype Testing


Scanning Electron
Microscope ( SEM )


Verify growth of CNT’s


17


Dr. Wu ( Florida International University )


Amit

Datye

( Oak Ridge National Laboratory )


John Hart ( Massachusetts Institute of Technology )



18

19