A new high precision defect detection system is to be built

unclesamnorweiganΤεχνίτη Νοημοσύνη και Ρομποτική

18 Οκτ 2013 (πριν από 3 χρόνια και 5 μήνες)

45 εμφανίσεις

A new high precision defect detection system is to be built

As part of

the
NanoMend project IBS
Precision Engineering,
Centre

for
Process Innovation limited (
CPI
)

and
the University of Huddersfield are
collaborating in the development of a
new optical interferometry system for
fast surface measurement of low
contrast defects over large
,
industrially

compatible

substrate
area
s.


D
efects
present in
thin films,
such
as
vapour barrier layers, have contrasts
too low

to
be picked
-
out by

the

machine vision
camera

systems

conventionally used for defect
detection.

The solution

to this is to use
optical
interferomet
ry
,

which is able to produce a
quantitative measurement of the film layer topographies in the form of a
three
dimensional

image
.

Analysis of thin film defects with interferometry can provide

richer information on the nature of the defect
,

so its significance
may be assessed.

Current
industry standard
interferomet
ry

systems
generally
work by
mechanically
scanning
the
position of
a
lens relative to the substrate

being measured
.
Such a
technique is too slow to perform the large number of measurements required to

perform defect detection over a large area.

The
instrument

being developed
as part of
the NanoMend project is a Wavelength
Scanning Interferometer (WSI) that can make 3D measurements
without mechanical
movement by simply
varying
the
wavelength

of the ligh
t source

in an interferometer
setup.
The aim is to produce a
f
ull
3D measurement
and analysis in under one
second.

Micro and nano
-
scale
defects
can be measured

effectively in a factory
environment because the WSI has integrated
environmental noise
compensa
tion. As
well as defects in film layers, t
he WSI can be used to measure

smooth
and
structured
surfaces.

By the end of the NanoMend project, in
2015
, t
his
apparatus
will
demonstrate
that
the
WSI technology can be scaled
-
up
to cover
roll
-
to
-
roll manufacturing processes.
The demonstrator will be located at CPI, which
forms part of the UK
’s new

High
-
Value Manufacturing Catapult.

The
pan
-
European
NanoMend project has received

7.25 Million of funding from the
F
ramework
S
even
P
rogramme of

the European Union.

The consortium include a mix
of industrial and academic partners, including; The University of Huddersfield, CPI,
Lappeenranta University of Technology, Tampere University of Technology, TNO,
Fraunhofer, NPL, Kite Innovation, Stora Ens
o, ISOVOLTAIC, Flisom AG, IBS
Precision Engineering BV and ISRA Vision AG.
To find out more click
here