FinFETs and 20nm Process Parameters for OPEX

scacchicgardenΛογισμικό & κατασκευή λογ/κού

13 Δεκ 2013 (πριν από 3 χρόνια και 8 μήνες)

105 εμφανίσεις

1

FinFETs

and 20nm

Process Parameters for OPEX

Jake Buurma

Si2 Vice President

jakeb@si2.org

Overview of Today’s Presentation


OPEX =
O
pen
P
arameters for
EX
traction



The Top 5 Reasons to Use OPEX



20nm process parameters and
FinFETs



Next Steps in Standardization

10/14/2013

3

The Top 5 Reasons to Use OPEX

10/14/2013

1.
Access

2.
Structure

3.
Acceleration

4.
Security

5.
Extensible


Access
: Scripting Languages

ITF

Collectors

ICT

MIPT

OPEX

Parser

SQLite

Database

ITF

Emitters

ICT

MIPT

Copyrighted

by Vendor

Contributed to

Si2 by Vendor

Tcl

Python

Perl

Ruby

API

XML

Excel

C


OPEX

3 Input

Formats

7 Output

Interfaces

ITF

ICT

MIPT

5

Structure: Three Degrees of Openness

10/14/2013

Collector

Emitters

Input

Output

Gain = Output / Input = 7

Data

Base

Output

Base

The three input formats
(ITF, ICT

and
MIPT
) were
all contributed to Si2 to support the OPEX standard

All output interfaces are
Open Languages
with well developed interfaces for SQLite

SQLite

is the world’s most used
database. Both open source and
commercial versions are available

6

Structure: Hierarchical SQL Database

OPEX

A1

OPEX

A2

F(x)

Parent Tables

Globals
, Diffusions, Poly, Routes,
Dielectrics, Vias,
FinFET

Devices…

Multiple SQLite

Databases


Child Tables

Rho, RPSQ, RPV, Area, Width, Space, Fill …

Functions

Resistance, Capacitive, Thickness, Etch, Temperature
Coef



Structure: Tables and SQL Queries

Etch Function of Conductor M4

Example Query

8

8

Acceleration: Rapid Development

Commercial formats must be parsed before they’re used by an application

Each parser is about 4,000 lines of code that has to be maintained


Reading a
SQLite database
with a scripting language is only ~10 lines

The Python code to read all of the
Conductor_Layers

is shown below:


Security: Levels

See: http://www.sqlite
-
encrypt.com


Commercial Transfer Format Limitations



All three formats may not be available simultaneously



The entire transfer file is encrypted or not



Different customers may require access to different data



Data types, Table Sizes, Relationships may or may not be
checked depending on the quality of the input parser



The C++ code for a clear text
SQLite

database is free



The C++ code for encrypted
SQLite

databases is <$100

Si2 Proprietary

10

Column Encryption

Child Table Encryption

DB Table Encryption

Clear Text

Cipher Text

Security: Multi
-
Level Options

Via_Layers table is clear text

Via Layer V4 Child Table is Encrypted

11

11

Security: Data Integrity

10/14/2013

First Level:

The
datatype

of every parameter is checked

Second Level:

The
relationship
of a parameter to another

Third Level:


All
Tables

and
Functions

must be well formed

OPEX Parser checks input data at three different levels

12

Extensions: The Ability to Look Forward


Initial version of OPEX was developed for 28nm nodes


Collectors for the three EDA vendors were developed


SQLite interfaces for Scripting, XML and Excel


Emitters proved reliability via round trip confirmation



Latest OPEX version updated for 20nm process nodes


The older SQL tables and parameters did not change


The basic OPEX parser did not change


New tables and functions were added via templates


Additional tables and functions for 20nm easily added

10/14/2013

13

13

Extensions: Parameters for 20nm Nodes

Extensions: Building a 20nm
FinFET

Start as Normal

Make a Sacrifice

Fill in the Fins

Build a
Mulit
-
Gate
FinFET

FinFETs

have dozens of parameters not required by planar MOS devices

FinFETs

were updated in OPEX by just adding new tables & functions

3 Dimensional
FinFET

Parameters

16

16

Extensions: RSD and Trench Contacts

10/14/2013

Raised Source Drain (RSD) Diffusions increase reliability and performance

Trench Contacts and Local Interconnect are used for Middle of Line

Extensions: Middle of Line (MOL) Interconnect

18

Extensions: Conformal Dielectrics

10/14/2013

Extensions: Conformal Dielectrics

20

Next Steps

1.
The DFMC reviews OPEX v1.0 draft for both accuracy
and completeness for the parameters at the 20nm node

2.
Members who belong to both the DFMC and OPDK
coalitions compare the OPEX spec and the OPS spec

3.
A “Conference Committee” works out any differences

4.
The updated Spec is submitted to the DFMC TSG for a
60 day IP Review and then a vote

5.
The approved OPEX spec is provided to the public

6.
The OPEX project kit (OPEX Parser, Test Cases,
SQLite

DBs…) are provided to the DFMC members

7.
Example
SQLite

databases are provided to Si2 members


THANK YOU!