High Purity Ball valves for the semiconductor Industry

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29 Νοε 2013 (πριν από 3 χρόνια και 11 μήνες)

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Dockweiler AG
An der Autobahn 10/20 · D-19306 Neustadt-Glewe · Tel. +49 (0)38757 58-0 · Fax +49 (0)38757 58-222 · e-mail: info@dockweiler.com · www.dockweiler.com
R OHR S YS T E ME AUS E DE L S T AHL
E vA N s B A l l v A l v E s – H P
1. M a t e r i a l
s s - 3 1 6 l s t a i n l e s s s t e e l
2. B a l l va l v e s i z e
0 4 - 1/4" 2 0 - 1 - 1/4"
0 6 - 3/8" 2 4 - 1 - 1/2"
0 8 - 1/2" 3 2 - 2"
1 0 - 5/8 4 0 - 2 - 1/2"
1 2 - 3/4" 4 8 - 3"
1 6 - 1" 6 4 - 4"
9 6 - 6"
3. M a i n T u b e d i a me t e r
0 4 - 1/4" 1 4 - 7/8" 4 0 - 2 - 1/2"
0 6 - 3/8" 1 6 - 1" 4 8 - 3"
0 8 - 1/2" 2 0 - 1 - 1/4" 6 4 - 4"
1 0 - 5/8" 2 4 - 1 - 1/2" 9 6 - 6"
1 2 - 3/4" 3 2 - 2" 1 2 8 - 8"
4. va l v e A s s e mb l y P a t t e r n D e s i g n a t o r
s T R – s t r a i g h t 2 - w a y
s H C – s i n g l e H o r i z o n t a l C r o s s
s H T – s i n g l e H o r i z o n t a l Te e
D H C – D o u b l e H o r i z o n t a l C r o s s
D H T – D o u b l e H o r i z o n t a l Te e
Dv T – D o u b l e ve r t i c a l Te e
D H A – D o u b l e H o r i z o n t a l A n g l e ( 9 0 ° )
5. M a i n T u b e C o n n e c t i o n
C – s t a i n l e s s s t e e l C o mp r e s s i o n F i t t i n g
D – P l u g g e d s t a i n l e s s s t e e l C o mp r e s s i o n F i t t i n g
F – F e ma l e N P T
M – 3 1 6 l s t a i n l e s s s t e e l Tu b e E x t e n s i o n
N – N W/K F va c u u m F i t t i n g
R – M a l e F a c e s e a l
T – F e r r u l e
Y – D o c k w e i l e r We l d C a p
6. O u t l e t C o n n e c t i o n D e s i g n a t o r
s a me o p t i o n s a s l i s t e d u n d e r 5.
7. O u t l e t C o n n e c t i o n s i z e
( s k i p t h i s d e s i g n a t o r f o r 2 - w a y va l v e s )
0 4 - 1/4" 1 4 - 7/8" 4 0 - 2 - 1/2"
0 6 - 3/8" 1 6 - 1" 4 8 - 3"
0 8 - 1/2" 2 0 - 1 - 1/4" 6 4 - 4"
1 0 - 5/8" 2 4 - 1 - 1/2"
1 2 - 3/4" 3 2 - 2"
8. P u r g e P o r t D e s i g n a t o r
( U p s t r e a m/D o w n s t r e a m)
1/4" P u r g e p o r t: 1/4" – 2 1/2"
1/2" P u r g e p o r t: 3"- 6"
X – N o p u r g e p o r t:
v – P u r g e va l v e
P – C o mp r e s s i o n
Z – C a p p e d M a l e F a c e s e a l
9. O p t i o n s
E – R a 0.2 5 µ m e l e c t r o p o l i s h e d b a l l a n d
t u b e e x t e n s i o n
Q – N o l u b e
Z – N o t h i g h p u r i t y
( c l e a n r o o m c l e a n i n g i s s t a n d a r d )
N O – N o r ma l l y o p e n a c t u a t o r – s p r i n g r e t u r n
N C – N o r ma l l y c l o s e d a c t u a t o r – s p r i n g r e t u r n
D A – D o u b l e a c t i n g a c t u a t o r
1 0. O p t i o n a l C o l o r e d H a n d l e D e s i g n a t o r
( l e a v e b l a n k f o r s t a n d a r d b l u e h a n d l e )
B - B l a c k G - G r e e n P - P u r p l e R - R e d
s - s i l v e r Y - Y e l l o w W - Wh i t e I – P i n k
s s - 0 8 - 2 4 - D H C M C 0 8 - X P
1 2 3 4 5 6 7 8 9 1 0
A b o v e p a r t n u mb e r d e s c r i b e s a 1/2 ” s t a i n l e s s s t e e l, d o u b l e Te e w i t h a 1 1/2 ” s t a i n l e s s s t e e l t u b e ma i n,
a 1/2 ” c o mp r e s s i o n a n d a s i n g l e, d o w n s t r e a m c o mp r e s s i o n p u r g e p o r t.
H i g h P u r i t y B a l l va l v e s f o r
t h e s e mi c o n d u c t o r I n d u s t r y
E vA N s PA R T N U M B E R I N G / O R D E R I N F O R M A T I O N
Dockweiler AG
An der Autobahn 10/20 · D-19306 Neustadt-Glewe · Tel. +49 (0)38757 58-0 · Fax +49 (0)38757 58-222 · e-mail: info@dockweiler.com · www.dockweiler.com
CPKD/11/11
R OHR S YS T E ME AUS E DE L S T AHL
T h e ma n u f a c t u r i n g p r o c e s s e s i n t h e s e mi c o n d u c t o r
i n d u s t r y d e ma n d b a l l v a l v e s o f t h e h i g h e s t s t a n d a r d
p o s s i b l e – f o r b u l k g a s o r f o r p r o c e s s c o o l i n g w a t e r s y s-
t e ms. L e a k i n t e g r i t y, c l e a n l i n e s s, h i g h fl o w r a t e s,
p r o v i d e d a t l o w i n s t a l l a t i o n c o s t, ma k e E v a n s H i g h P u r i t y
B a l l V a l v e s t h e n u mb e r o n e s p e c i fi e d b a l l v a l v e i n t h e
s e mi c o n d u c t o r i n d u s t r y w o r l d w i d e.
Te mp e r a t u r e r a n g e - 4 0 t o 2 3 2 ° C
M a x i mu m w o r k i n g p r e s s u r e
a c c. t o C E ma r k i n g r e q u i r e me n t s i n b a r
1/4 “ 5 5 *
3/8 “ 5 5 *
1/2 “ 5 5 *
3/4 “ 5 5 *
1 “ 5 5 *
1 - 1/2 “ 5 5
2 “ 5 5
3 “ 3 4
4 “ 3 4
* ball valves of these sizes do not require CE marking tags
Available body configurations


• straight
• simple Tee
• Double Tee
Specification
of stainless steel Body
Advantages
• lower system cost
– Reduced number of welds and fittings
– No disassembly of ball valves necessary
– Flexibility with system layout
• Full tube diameter allows unrestricted gas flow
• speciality manufacture
– Manifold assemblies, also special lengths
– Wide variety of end connections
• End control of assembly in controlled environment
• Full selection of Ball valves
– (from 1/4” to 6”)
• Tube weld ends with Dockweiler Tubing
(full traceability of melts)
• locking handle as standard
• 100% leak test for all configurations
(1 x 10
-7
mbarl/sec)
• Cleanroom treatment and packaging (HP)
– visual inspection of all media contact surfaces
– Capped, double bagged in PE foil
– All Evans (HP) Ball valves are assembled and tested
in a cleanroom
– Final DI-water rinsed and ovendried
• Inert bulk gas distribution
• Nitrogen for pneumatic applications
• Process vacuum exhaust
• Dry, oil free compressed air systems
• solvents, e.g. isopropylalcohol
• Breathable air
Applications
MATERIAls OF CONsTRUCTION

Item Description Material Quantity
1 Body CF8M 1
2 End Cap CF3M/CF8M 2
3 Ball CF8M 1
4 stem ss316 1
5 Ball Seat PTFE, Teflon 2
6 Body Seal PTFE, Teflon 2
7 Thrust Washer PTFE, Teflon 1
8 Stem Packing PTFE, Teflon 1
9 stem Nut ss304 1
10 Handle ss304 1
11 Handle Nut ss304 1
11a Handle Washer ss304 1
12 Body Bolt ss304 4
13 Bolt Washer ss304 4
14 Bold Nut ss304 4
15 Handle sleeve ss304 1
16 locking Device ss304 1
size 1/4" 3/8" 1/2" 3/4" 1" 1 1/2" 2" 2 1/2" 3" 4" 6" 6"RP 8" 8"RP
Ø ID mm 4,60 7,50 10,21 15,81 22,11 34,81 47,52 60,22 72,93 97,42 150,17 125,02 197,18 150,17
Ø OD mm 6,35 9,53 12,70 19,05 25,40 38,10 50,80 63,50 76,20 110,60 152,40 152,40 203,20 203,20
T mm 0,89 0,99 1,25 1,65 1,65 1,65 1,65 1,65 1,65 2,11 2,77 2,77 3,05 3,05
Overall
length l mm 66,43 65,43 135,05 138,05 152,05 190,07 204,07 254,10 280,02 306,19 376,58 320,17 521,16 376,58
Handel
swing C mm 103,04 103,04 103,04 128,04 155,05 194,08 194,08 295,26 395,13 495,24 n/a n/a n/a n/a
Center Tube
Diameter/
Handle Ht. H mm 53,03 53,03 58,01 63,02 73,03 90,03 98,03 139,04 149,06 178,07 231,23 197,94 n/a 231,23
Dimensional Data – stainless steel Body (ss series Ball valve)
EvANs BAll vAlvEs – HP