Shamil Baldeosingh
Dasney Joseph
Walter McKinley
March 4
th
, 2010
EML 4905 Senior Design Project
Advisor: Dr. K. H. Wu
March 24, 2010
1
Background
Problem Statement
Design Specifications
Conceptual Designs
Project Management
Future Plans
2
Chemical Vapor Deposition ( CVD )
Widely used for engineering applications
•
Scalable to industrial production
•
20
-
100 % yield
•
Controllable parameters to determine properties
3
Large Research Interest
Properties
•
Mechanical
•
Electrical
•
Thermal
•
Novel Applications
Variations
•
Dimensions and Geometry
•
Quality and Yield
Zhao
et al.
,
Physical Review Letters
,
4
CNT synthesis for current CVD system
3 hours for sample size of 1
–
5 grams
▪
Furnace heating of entire reaction chamber
▪
Such a large sample size is not necessary for research
CNT synthesis for proposed CVD system
0.5 hours for sample size of less than 1 gram
▪
Localized heating of gases and substrate
▪
Appropriate for research applications
5
Preheated Gas Temperature
•
At least
400
̊c
Substrate Temperature
•
600
-
1000
̊c
6
Volumetric flow Rate
(
mL
/min)
PROCESS GAS
Hydrogen (H
2
)
400
PRECURSOR GAS
Acetylene (C
2
H
2
)
100
CARRIER GAS
Argon (
Ar
)
600
Packaging
Accessibility
Substrate should be easily loaded
Maintenance of system
Gas flow
Reynolds number << 2100 : Laminar Flow
Peclet number << 1
Knudsen number > 1
7
8
9
10
Design A
Straight Tube
Design
B
Variable Cross
Section Tube
Design C
Cube
Packaging
4
4
1
Accessibility
5
5
1
Gas
Flow
3
2
4
Price
1
2
5
Excellent
–
1
Very Good
-
2
Good
–
3
Fair
–
4
Poor
-
5
11
Substrate Material
•
Wafer
•
Powder
Resistive Heating
Element
•
Material
•
Configurations
•
Life span
Thermal Strength
•
Thermal Shock
•
Thermal Expansion
•
Deflection
Power Input
•
AC vs. DC
•
H
-
Current/ L
-
Voltage
•
L
-
Voltage/H
-
Current
12
Heat Generation
Dasney
Joseph
Instrumentation and Fluid Mechanics
Shamil
Baldeosingh
Conceptual Designs and Prototype
Walter McKinley
13
Gantt Chart
-
Spring 2010
14
15
Gantt Chart
-
Fall 2010
16
0
5
10
15
20
25
TIME (hours)
January
February
March
April
SHAMIL
DASNEY
WALTER
Design Modeling
•
SolidWorks
Simulation
•
ANSYS CFX
▪
Fluid Mechanics
▪
Heat Transfer from Resistive
Heating Elements
Instrumentation and
Control
•
LabVIEW
•
Thermocouple
•
Infrared Temperature
Sensor
•
Mass Flow Controller
Prototype Testing
•
Scanning Electron
Microscope ( SEM )
▪
Verify growth of CNT’s
17
Dr. Wu ( Florida International University )
Amit
Datye
( Oak Ridge National Laboratory )
John Hart ( Massachusetts Institute of Technology )
18
19
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