ARD Presentation

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RFID Shelving

www.cs.bgu.ac.il/~iditger

ARD Presentation:

11 Dec 2006


Guy Shtub


Idit Gershoni

Introduction



A
Fab

is a factory where integrated circuits
devices are manufactured.



Fab 18

-

Intel’s 200mm Fab located in
Kiryat Gat, Israel.


Some basic terms

Reticle

-

An optical template inserted into the
manufacturing machines in the Lithography
area.


RFID



R
adio
F
requency
id
entification is a
technology that uses devices

attached to
objects that transmit data to a (RFID) receiver.
Alternative to

bar coding. Its advantages
include data capacity, read/write capability,
and no

line
-
of
-
sight requirements.


Lithography = The process of imprinting patterns

About the Fab and the Process


The production process for a single silicon
wafer can take as much as a few months.


In some areas of the clean room, when a
wafer is handled by a machine, a reticle is
placed into the machine by a technician.


Wafer = silicon slice (raw material)

Current Situation (
1
)

Until recently, reticles were automatically stored
and transported between the storage room and
the working stations.


This ensured that the technician could not make
an error in placing a different reticle then the one
needed.



Such an error could infect many silicon wafers
and as a result, cause severe financial damage
to the company.

Current Situation (2)

“Railway”

Tracks in the

clean room’s

ceiling

Lot = pack of 25 silicon wafers

The Problem

Recently Intel’s Fab18 started using a new
manufacturing technology. For this technology new
reticles are used.


The new reticles are larger and don’t fit in the old
reticle storing and transportation system.


The technicians manually bring the reticles


from the storage room to the work stations.


Human errors can occur. No control.


The project aims at preventing critical human errors
from occurring.


The Solution


RFID technology.


RFID tags that will be used:

Passive RFID employee tag.

RFID tag that will be placed on the reticles.


The reticles will be stored in the 3rd party



shelves (Cabinet).


When a technician needs a reticle an order is
made.


If the order is for a reticle that cannot be
transferred through the automatic conveyer system
our system will come into action.

The solution


step by step

A technician goes to storage room through the
gate.


The gate contains an RFID reader that reads the
technicians employee tag.


The system will identify the employee, link the
data to the specific order, and indicate the
correct POD (cell) where the reticle is placed.


When a reticle is taken or inserted into a POD, a
placement sensor will recognize the change.


The reticles will be identified by using a


RFID reader placed in each POD.

The solution


The Shelves

System Component Architecture

Built from
scratch

Built
from
scratch

3
rd

party
hardware

3
rd

party
hardwar
e

Existing components

Functional Requirements(1)

Reticle insertion to the Cabinet



Identifying a technician going to the reticle
shelves.

Allowing a technician to place a reticle in an
empty space.

Providing positive acknowledgement when
the employee RFID is read.

Read RFID tags from a reticle and send


it to the PDA

Reticle information will be stored


in the RTS and PAS.


Functional Requirements(2)

Reticle removal from the Cabinet



Enabling a technician to order a certain reticle via the MTUI system.

Verify that the reticle exists and currently stored inside the cabinet.

Approve a technician’s request, and keeps the information in the
RTS and PAS systems.

Automatically recognize a technician passing through the gate.

Cabinet beeps, blinking the LED in the shelf where the required
reticle is stored.

When the desired reticle is removed, the cabinet beeps again.

Information regarding the specific reticle that was removed and the
employee will be sent to the PDA and from there to the Control
System.

This information will be stored in the RTS and PAS databases.

Functional Requirements(3)

Update reticle data in the system



The operator will be able to place a reticle in
the association station RFID reader.

System will read the reticle’s RFID value and
displays it to the operator.

The operator will be able to insert the required
information into the PAS and RTS database,
by using the PAS GUI.

Data will be written to the reticle RFID tag
using the RFID writer.

Non Functional Requirements (1)

Speed, Capacity & Throughput:


Technician identification process at the gate will take up
to 2 seconds.

In 95% of the cases, the system will succeed in reading &
identifying the employee passing through the gate. In the
rest of the cases the system will indicate the identification
failure.

The system will never falsely identify a technician.

If a technician removes a wrong reticle (different than the
one ordered), the system will indicate wrong action within
2 seconds.

Only one person can pass through the gate at a time.

Non Functional Requirements (2)


Safety & Security:



The system is an internal organization system.


The data does not need to be encrypted.



No cryptographic protocols will be used.


Availability:




Being part of the manufacturing floor



the system will work around the clock.



The system will be available 98%



of the time.

Non Functional Requirements (3)

Usability:



Technician will use the system without any
learning. The usage of the system is based on
previous knowledge they posses.



The system operator will require about a day
to learn how to operate the system.

Use Cases

Use Case 1 :

Name:




Reticle insertion to the Cabinet

Description
:




Technician inserts a reticle into a POD

of a shelf.

Post
-
Condition:




Reticle is identified & placed in a POD.

Use Case 1 :

Name:




Reticle removal from the Cabinet

Description
:




Technician places an order for a


reticle, goes to the shelves and gets it.

Post
-
Condition:





Technician receives the desired reticle.

Use Case 2 :

Use Case 2 :

Name:




Update reticle data in the system

Description
:




System Operator needs to define a

new reticle in the system, or update

data for existing reticle.

Post
-
Condition:





Reticle information is




updated.

Use Case 3 :

Use Case 3 :

Risks

The success of the project depends
(among other things) on 3
rd

Party
company.

The End






Questions?



Thank You