Product Data Sheet Ammonia VLSI Grade - Air Products and ...

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Ammonia (NH
3
)
VLSI Grade
Total Purity ≥99.999%*
(excludes Hydrogen)


VLSI Grade Ammonia
(99.999%) is our standard
purity grade for semicon-
ductor process applica-
tions. Ammonia is a color-
less, pungent, flammable
gas at atmospheric pres-
sure and temperature. It
is irritating to the mucous
membranes and toxic in
high concentrations. It is
shipped as a liquefied gas
under its own pressure.

Specifications
Carbon Dioxide (CO
2
) ≤ 1.0 ppmv
Carbon Monoxide (CO) ≤ 1.0 ppmv
Methane (CH
4
) ≤ 0.5 ppmv
Nitrogen (N
2
) ≤ 3.0 ppmv
Oxygen and Argon (O
2
& Ar) ≤ 1.0 ppmv
Water (H
2
O) ≤ 2.0 ppmv
Standard Package Information—Asia, North America & Europe
Material Number 63070
Cylinder Size ISO
Fill Weight (lbs) 25,353
Fill Weight (kgs) 11,500
Valve Connection 1” VCR Pneumatic
Cylinder Dimensions (in) 20FT ISO
The information contained herein is offered without charge for use by technically qualified
personnel at their discretion and risk. All statements, technical information and
recommendations contained herein are based on tests and data which we believe to be
reliable, but the accuracy or completeness thereof is not guaranteed and no warranty of any
kind is made with respect thereto.
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© Air Products and Chemicals, Inc., 2012 325-12-095-GLB
airproducts.com/electronics
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